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Plasma-activated high-rate deposition of oxides on plastic films
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1994
Conference Paper
Title
Plasma-activated high-rate deposition of oxides on plastic films
Author(s)
Schiller, S.
Neumann, M.
Morgner, M.
Schiller, N.
Mainwork
Technical conference of the society of vacuum coaters (SVC) '94. Proceedings
Conference
Technical conference of the society of vacuum coaters (SVC) 1994
Language
English
Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP
