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Plasma-activated high-rate deposition of oxides on plastic films

 
: Schiller, S.; Neumann, M.; Morgner, M.; Schiller, N.

Technical conference of the society of vacuum coaters (SVC) '94. Proceedings
1994
pp.203-211
Technical conference of the society of vacuum coaters (SVC) <1994, Boston>
English
Conference Paper
Fraunhofer FEP ()

: http://publica.fraunhofer.de/documents/PX-28743.html