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Plasma-activated high-rate deposition of oxides on plastic films
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1994
Conference Paper
Titel
Plasma-activated high-rate deposition of oxides on plastic films
Author(s)
Schiller, S.
Neumann, M.
Morgner, M.
Schiller, N.
Hauptwerk
Technical conference of the society of vacuum coaters (SVC) '94. Proceedings
Konferenz
Technical conference of the society of vacuum coaters (SVC) 1994
Language
English
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Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik FEP