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Plasma-activated electron beam deposition with diffuse cathodic vacuum arc discharge (SAD)

A technique for coating strip steel
: Metzner, C.; Scheffel, B.; Goedicke, K.

Sartwell, B.D. ; American Vacuum Society, Vacuum Metallurgy Division; American Vacuum Society, Thin Film Division:
23rd International Conference on Metallurgical Coatings and Thin Films 1996. Papers presented at the Conference
Amsterdam: Elsevier, 1996 (Surface coatings and technology 86/87)
International Conference on Metallurgical Coatings and Thin Films <23, 1996, San Diego/Calif.>
Conference Paper
Fraunhofer FEP ()
electron beam evaporation; ion plating

The diffuse cathodic vacuum arc discharge is an efficient plasma source suitable to activate the process of high-rate electron beam deposition on large areas. With condensation rates of some microns per second, ion current densities of, say, 100 mA cm(-2) and more can be obtained on the substrate. The layout of equipment and process control offers many opportunities to match this coating process, termed SAD, to the specific requirement of the various layer materials and applications. Presented in this paper are the results of process development. The deposited layers are characterized especially by their high density, ductility and smooth surface. Exemplified by the coating of strip steel with titanium, the resulting effects on the properties of the coated product are shown in detail. Of particular significance is the high corrosion protecting action that is maintained also after deformation of the coated substrates. Finally, an outlook is given on practicable possibilities of use.