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Planar fluxgate sensors, experimental data and theoretical analysis

: Wende, U.; Kunze, D.; Gottfried Gottfried, R.

Puers, R. ; Catholic Univ., Leuven:
Eurosensors X. Proceedings
Leuven: Catholic University, 1996
ISBN: 90-803282-1-9
pp.143-146 : Lit.
Eurosensors <10, 1996, Louvain>
Conference Paper
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
CMOS; dünne magnetische Schicht; ferromagnetischer Stoff; Fluxgate-Sensor; Magnetfeld; Methode der finiten Elemente; Signalanalyse

An integrated fluxgate sensor fabricated in a CMOS-compatible technology is investigated by measurements and theoretical analysis. We report on magnetic field calculations for a thin core with nonlinear ferromagnetic material properties and the method to bring FEM-calculations and measurement results together by a transient analysis and search algorithm. Experimental results are compared to numerical analysis.