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Planar fluxgate sensors

experimental data and theoretical analysis
: Wende, U.; Kunze, D.; Gottfried-Gottfried, R.


Sensors and Actuators. A 61 (1997), No.1-3, pp.273-278
ISSN: 0924-4247
Journal Article
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
ferromagnetischer Stoff; Fluxgate-Sensor

An integrated fluxgate sensor fabricated in a CMOS-compatible technology is investigated by measurements and theoretical analysis. We report on magnetic-field calculations for a thin core with non-linear ferromagnetic material properties and the method fot the comparison of field calculations and measurement results by a transient analysis and search algorithm.