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Phosphourus-enhanced diffusion of antimony due to generation of self-interstitials

: Pichler, P.; Ryssel, H.; Ploß, R.; Bonafos, C.; Claverie, A.

Fulltext urn:nbn:de:0011-px-283653 (878 KByte PDF)
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Created on: 7.2.2015

Journal of applied physics 78 (1995), No.3
ISSN: 0021-8979
ISSN: 1089-7550
Journal Article, Electronic Publication
Fraunhofer IIS B ( IISB) ()
antimony diffusity data; Boltzman-Mantano analysis; implantation; phosphorus diffusion; phosphorus precipitation; polysilicon layer; self interstitial injection; single-crystalline substrate

In a series of experiments, the influence of phosphorus diffusion at high concentrations on the diffusion of an antimony marker layer was investigated. The marker layer was separated from the surface by a 4 micrometer layer of epitaxially grown silicon. To reduce the effects of implantation enhancement and phosphorus precipitation on M diffusion of the antimony marker layer, the phosphorus was implanted into a polysilicon layer deposited on top of the single-crystalline substrate. R was found that the diffusion of the antimony marker layer is already reduced by the epilayer. From these diffusion coefficients, upper limits for the fractional diffusivity of antimony wore derived. In contrast to previous investigations, the diffusion of the antimony marker layer was found to be enhanced below regions where phosphorus was implanted. A comparison of diffusions in FZ and CZ samples shows that this enhanced diffusion of antimony can be explained only by an injection of self-interstitials from the phosphorus -doped region. Since the polysilicon layer was found to recrystallise, this self-interstitial injection can be the result of phosphorus diffusing mainly via self-interstitials, phosphorus precipitation, or both. Using Boltzmann-Matano analysis and antimony diffusivity data, the fractional diffusivity of phosphorus via self-interstitials was estimated to be lower than 0.71 at 950 Grad C. Possible sources of error in this estimation are discussed.