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The ph-sensing properties of tantalum pentoxide films fabricated by metal organic low pressure chemical vapor deposition
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1997
Journal Article
Titel
The ph-sensing properties of tantalum pentoxide films fabricated by metal organic low pressure chemical vapor deposition
Author(s)
Mikolajick, T.
Kühnhold, R.
Ryssel, H.
Zeitschrift
Sensors and Actuators. B
DOI
10.1016/S0925-4005(97)00166-4
Language
English
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