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  4. Personal computer based control and evaluation of Langmuir probe characteristics
 
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1995
Journal Article
Title

Personal computer based control and evaluation of Langmuir probe characteristics

Author(s)
Neumann, G.
Kammeyer, M.
Schneemann, B.
Journal
Measurement Science and Technology  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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