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Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning

: Dura, H.-G.; Hosticka, B.J.; Mokwa, W.; Schöneberg, U.; Vogt, H.

	Consiglio Nazionale delle Ricerche -CNR-, San Michele all'Adige: Eurosensors V. Book of Abstracts San Michele all'Adige, 1991 pp.64
	Eurosensors <5, 1991, Rom>

	English
	Conference Paper
	Fraunhofer IMS ()
	gas sensor; gassensor; hydrogen sensor; Langzeitverhalten; long-term stability; measurement probe; Meßaufnehmer; Wasserstoff

Abstract
Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to take place. Measurements show an improved long-term stability. A comparison between the integrated sensor system and a gas-sensitive FET integrated on the same chip allows these different types of sensors to be directly compared.

: http://publica.fraunhofer.de/documents/PX-28178.html