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  4. Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning
 
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1991
Conference Paper
Title

Performance of hydrogen-sensitive MOS capacitances with integrated on-chip signal conditioning

Abstract
Gas-sensitive MOS capacitors with on-chip readout electronics are investigated. The use of these capacitors in combination with switched capacitor circuitry enables a.c. operation of the device to take place. Measurements show an improved long-term stability. A comparison between the integrated sensor system and a gas-sensitive FET integrated on the same chip allows these different types of sensors to be directly compared.
Author(s)
Dura, H.-G.
Hosticka, B.J.
Mokwa, W.
Schöneberg, U.
Vogt, H.
Mainwork
Eurosensors V. Book of Abstracts  
Conference
Eurosensors 1991  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • gas sensor

  • gassensor

  • hydrogen sensor

  • Langzeitverhalten

  • long-term stability

  • measurement probe

  • Meßaufnehmer

  • Wasserstoff

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