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Particle micromanipulator consisting of two orthogonal channels with travelling-wave electrode structures
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1994
Journal Article
Title
Particle micromanipulator consisting of two orthogonal channels with travelling-wave electrode structures
Author(s)
Fuhr, G.
Fiedler, S.
Müller, T.
Schnelle, T.
Glasser, H.
Lisec, T.
Wagner, B.
Journal
Sensors and Actuators. A
DOI
10.1016/0924-4247(94)80116-9
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT