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Particle measurements in turbulent flow areas as as part of investigations at cleanroom equipment

: Kahlden, T. von

International Committee on Contamination Control Societies -ICCCS-:
Integrated Contamination Control. A necessity for knowledge transfer. Proceedings : 13th International Symposium on Contamination Control, September, 16 - 20, 1996, Nederlands Congresgebouw, The Hague
Amersfoort: VCCN, 1996
ISBN: 90-9009756-2
International Symposium on Contamination Control <13, 1996, Den Haag>
Conference Paper
Fraunhofer IPA ()
Fluidik; Oberfläche; Partikelmeßtechnik; Reinraum; Reinraumtauglichkeit; Reinraumtauglichkeitsuntersuchungen; Reinraumtechnik; Strömungstechnik; Teilchen

The cleanroom suitability as an acceptance criteria of equipment gets more and more important for the user. Equipment with particle emission always produces particle deposition on the product causing failures. An overall method for investigations of the cleanroom suitability has been developed and will be introduced in an overview. This method contains different parameters like, flow disturbance, particle emission in the air and particle deposition on surfaces. The focus in here covers the area of airborne particle measurements in and around equipment in turbulent flow areas.