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3D structures for microsystem technology using advanced proximity lithography
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1995
Journal Article
Titel
3D structures for microsystem technology using advanced proximity lithography
Author(s)
Cullmann, E.
Löchel, B.
Engelmann, G.
Reyerse, C.
Zeitschrift
Solid state technology
Language
English
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Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT