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Optimization of Ultraclean Gas Supply Systems

Optimierung von hochreinen Gasversorgungssystemen
: Dorner, J.

Cleanrooms '96 West. Tutorial
S.l.: PennWell, 1996
Session 602, pp. 6-21
Conference on Advanced Microcontamination and Ultrapure Manufacturing <1996, Santa Clara/Calif.>
Conference Paper
Fraunhofer IPA ()
Meßverfahren; particle measurement; Partikelmessung; Prüftechnik; Prüfung; Reinstgas; Reinstgasversorgung; Teilchen

The testing method developed offers the possibility of testing a variety of ultra-pure gas supply components (valves, filters, pressure-reducers, etc.) even under instationary working conditions. A large number of tests were carried out over the last few years by the Fraunhofer IPA. With the information obtained, manufacturers of gas supply components and systems were able to improve their products with regard to lowest possible particle entry.