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Optimization of contacts for CMOS

 
: Vogt, H.; Gruber, V.; Zimmer, G.

ESSDERC '86. 16th European Solid State Device Research Conference. Proceedings
1986
European Solid State Device Research Conference <16, 1986, Cambridge>
English
Conference Paper
Fraunhofer IMS ()

: http://publica.fraunhofer.de/documents/PX-27512.html