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Optical and particle properties of PLD vapour/plasmas of ceramics

: Alunovic, M.; Stamm, H.; Aden, M.; Kreutz, E.W.


Applied surface science 96/98 (1996), pp.222-226
ISSN: 0169-4332
Journal Article
Fraunhofer ILT ()
beam geometry; detector; laser parameter; optical emission spectroscopy; pulsed laser deposition; vacuum chamber; wave length

The electron density and the absorption coefficient of the laser induced vapour/plasma as well as the geornetry of the expanding plasma are investigated by the beam deflection. The electron density is examined in dependence on different parameters. The results obtained by beam deflection are compared to those of optical emission spectroscopy. By comparing both methods of measurement it can be claimed that a local thermal equilibrium (LTE) is present in the vapour/plasma.