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ONO structures investigated by SIMS, RBS, and NRA

: Ramm, P.; Iberl, F.; Lang, W.

Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 64 (1992), No.1-4, pp.650-653
ISSN: 0168-583X
International Conference on Ion Beam Analysis <10, 1991, Eindhoven>
Journal Article, Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert