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One-level gray-tone lithography for micro optical components
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1996
Conference Paper
Title
One-level gray-tone lithography for micro optical components
Author(s)
Reimer, K.
Henke, W.
Quenzer, H.J.
Demmeler, R.
Wagner, B.
Mainwork
OPTO '96. 2. Kongress Optische Sensorik, Meßtechnik, Elektronik. Kongreßband
Conference
Kongreß mit Fachausstellung für Optische Sensorik, Meßtechnik, Elektronik 1996
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
