Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. One-level gray-tone lithography - mask data preparation and pattern transfer
| Parriaux, O.M. ; Centre National de la Recherche Scientifique -CNRS-, Paris:
Micro-optical technologies for measurement, sensors and microsystems
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2169-3
pp.71-79 |
| International Symposium on Laser, Optics and Vision for Productivity in Manufacturing <1, 1996, Besancon> |
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| English |
| Conference Paper |
| Fraunhofer ISIT () |