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One-level gray-tone design. Mask data preparation and pattern transfer

 
: Reimer, K.; Henke, W.; Hofmann, U.; Merz, P.; Wagner, B.

Optics and optoelectronics. Theory, devices, and applications. Vol.2
New Delhi, London: Narosa Publishing House, 1998
pp.1298
English
Book Article
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-27229.html