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On-wafer single contact S-parameter measurements to 75 GHz - calibration procedure and measurement system

On-Wafer S-Parametermessungen bis 75 GHz mit einmaligem Kontaktieren des DUTs - Kalibrier-Routine und Meßsystem
: Tasker, P.J.; Schlechtweg, M.; Braunstein, J.


23rd European Microwave Conference '93. Proceedings
pp.305-307 : Abb.
European Microwave Conference (EuMC) <23, 1993, Madrid>
Conference Paper
Fraunhofer IAF ()
millimeter-wave measurement; Millimeterwellen-Messung; S-parameter measurement; Streuparametermessung

A measurement system based on coaxial wafer probes has been developed that allows, for the first time, on-wafer measurement of s-parameters over the full frequency range from 45 MHz to 75 GHz (microwave to millimeter wave) with a single probe contact. In addition, it was found that the non-ideal behavior of the on-wafer calibration standards had a significant influence on the measured accuracy at millimeter wave frequencies. The accuracy of the on-wafer s-parameter measurements to 75 GHz, obtained in this measurement system, was improved by the development of a calibration enhancement procedure. This calibration enhancement procedure allows the non-ideal behavior of the on-wafer calibration standards to be accounted for directly in the (HP8510) Network Analyzer 12 term two-port error correction model.