1.2 Volt CMOS readout electronics for capacitive sensors

A CMOS readout electronics for capacitive sensors operating at 1.2 Volt single supply is presented. It is based on a low voltage SC circuit technique and use of on-chip clock voltage doubler. The circuit has been fabricated in standard CMOS technology with |VT|=0.8V and requires no external components. Measurements have shown performance comparable to SC circuits operating at 5-10V supplies with SNR exceeding 80dB in audio frequency range. Operation of the readout electronics together with a silicon pressure microsensor array is demonstrated.