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Novel potentiometric silicon sensor for medical devices


Middelhoek, S.:
Transducers '95. Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, Eurosensors IX. Part 5
Amsterdam: Elsevier, 1996 (Sensors and actuators. B Chemical)
International Conference on Solid-State Sensors and Actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Conference Paper
Fraunhofer ISIT ()

The fabrication process for a potentiometric silicon sensor is described. The sensor was fabricated in bulk silicon micromachining using double side wafer processing. A small channel was etched anisotropically in (100) silicon. The back side groove was metallized. To form an ion-selective electrode, an ion-selective membrane was deposited in the channel. Additionally, a novel type of Ag/AgCl/Ag reference electrode was integrated on the front side of the chip. The small size of the sensor allows application in catheter systems.