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1996
Conference Paper
Title

A new sensor system for SO2 with IDC and SAW elements

Abstract
Applying new transducer principles on well known indicator materials improves the performance of the whole system, especially the humidity interference. A well known SO2-sensitive material (heteropolysiloxane, NND)/PTMS) was tested with a SAW (Surface Acoustic Wave, STW Surface Transverse Wave Mode) transducer and an IDC (Interdigital Capacitor) device. Due to a different relative sensitivity of the coated IDC and SAW device to SO2 and humidity, we were able to reduce the overall cross-sensitivity of the system to humidity significantly. The combination of these two different types of transducers, in case of need extended with other transducers, increases the performance of the sensor system.
Author(s)
Leidl, A.
Hartinger, R.
Roth, M.
Endres, H.-E.
Mainwork
Transducers '95. Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, Eurosensors IX. Part 5  
Conference
International Conference on Solid-State Sensors and Actuators 1995  
Eurosensors 1995  
Language
English
IFT  
Keyword(s)
  • gas sensor

  • heteropolysiloxane

  • humidity

  • IDC

  • interdigital capacitor

  • micro system technology

  • SAW

  • signal processing system

  • SO2

  • surface acoustic wave

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