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New sensor system for optoelectronic microprofilometry

: Warnecke, H.-J.; Ahlers, R.-J.; Kim, H.

Chen, M.J.W.; Ahlers, R.-J. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Automated inspection and high speed vision architectures
Bellingham/Wash., 1987 (Proceedings of SPIE 849)
pp.218-224 : Abb.,Lit.
Conference on Advances in Intelligent Robotics Systems <1987, Cambridge/Mass.>
Conference Paper
Fraunhofer IPA ()
Koordinatenmeßtechnik; Meßtechnik(optisch); Mikrofilometrie; Oberflächenmeßtechnik; Rauheit; Triangulationsverfahren

An optoelectronic sensor system will be presented that measures distances in the range of micrometers. It is based on a triangulation principle and is expected to be integrated into coordinate measurement systems for high precision measurement tasks. The system consists of a laser, a linear CCD-array and a special optical system. Thus it is possible to measure complex workpieces that could not be evaluated by tactile means. Special attention is directed to surface roughness and surface tilt. These factors influence the results obtained during a scanning cycle. (IPA)