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New quantitative line scanning technique for homogeneity assessment of semi-insulating GaAs wafers
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1985
Journal Article
Title
New quantitative line scanning technique for homogeneity assessment of semi-insulating GaAs wafers
Author(s)
Baeumler, Martina
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Kaufmann, U.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Windscheif, J.
Journal
Applied Physics Letters
DOI
10.1063/1.95913
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Keyword(s)
Galliumarsenid
Homogenitaets-Kontrolle
Infrarotabsorption
