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Multischichten für die Optik im weichen Röntgengebiet

 
: Dietsch, R.; Mai, H.; Pompe, W.; Völlmar, S.

Verein Deutscher Ingenieure e.V. -VDI-, Düsseldorf:
VDI-Statusseminar
Düsseldorf, 1992
Verein Deutscher Ingenieure (Statusseminar) <1992, Fulda>
German
Conference Paper
Fraunhofer IWS ()
dünne Schicht; Ellipsometrie; ellipsometry; laser ablation; Ni/C multilayer structure; Ni/C-Multischicht; plasma source; Plasmaquelle; Röntgenbeugung; Röntgenspiegel; SNMS depth profiling; SNMS-Tiefenprofilanalyse; TEM-cross-section; thin films; UHV-Abscheideeinrichtung; UHV-deposition equipment; x-ray diffraction; X-ray mirror

Abstract
The paper describes the application of the LPVD-method for X-ray multilayer synthesis. The principle and the advantages of this method are described. A new target/substrate arrangement allows the deposition of individual layers of good thickness homogeneity. The correlation between the target and/or substrat motion and the layer thickness distribution is shown by computer simulation. In practice a thickness deviation of typically 1,6 % remained within 60 mm length of a carbon layer of 70 nm thickness. The Ni/C-multilayers, prepared by Nd-YAG-laser ablation were characterized by X-ray diffraction, TEM-cross-section, SNMS and SEM. The results of Nd-YAG-laser ablation are compared with those of COsub2-laser ablation.

: http://publica.fraunhofer.de/documents/PX-25345.html