English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Multiaxial electromagnetic microactuators
Details
Full
Export
Statistics
Options
1991
Conference Paper
Titel
Multiaxial electromagnetic microactuators
Author(s)
Wagner, B.
Benecke, W.
Hauptwerk
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Konferenz
International Conference on Solid-State Sensors and Actuators 1991
Language
English
google-scholar
View Details
Fraunhofer-Institut für Siliziumtechnologie ISIT