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Multi-type surface and thin film characterization using light scattering, scanning force microscopy and white light interferometry

: Duparre, A.; Notni, G.

Al-Jumaily, G.A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical metrology. Proceedings : Proceedings of a conference held 18 - 19 July, 1999, Denver, Colorado
Bellingham, Wash.: SPIE, 1999
ISBN: 0-8194-3235-0
Conference "Optical Metrology" <1999, Denver/Colo.>
Conference Paper
Fraunhofer IOF ()
light scattering; microtopography; optical thin films; scanning force microscopy; surface roughness; white light interferometry

The characterization of surface and thin film morphologies and roughnesses significantly benefits from appropriately utilizing different measuring techniques. When suitably combining light scattering measurements, scanning force microscopy, and white light interferometry, comprehensive characterization over a wide range of sample types and roughness scales can be accomplished. A concise overview on the characterization techniques is given, followed by examples of combined measurements. The presented results include a variety of samples such as superpolished and microrough substrates, thin film coatings for applications from the visible to the deep ultraviolet region, and rough engineering surfaces.