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MOSFET gas sensor with integrated temperature measurement and heating elements fabricated with standard CMOS technology

: Dobos, K.; Mokwa, W.; Vogt, H.; Zhang, Y.; Zimmer, G.; Xiao, G.

Eurosensors II. Book of Abstracts
Eurosensors <4, 1988, Enschede>
Conference Paper
Fraunhofer IMS ()
gassensor; MOSFET

Gas sensor based on MOSFET devices with a catalytic active metal gate are well suited for the detection of various gases like hydrogen, ammonia or carbon monoxide. The compatibility of fabricating the MOSFET gas sensors with standard silicon IC technology enables direct sensor data acquisition and processing on one chip. Due to the low power consumption, the high noise margin and the possibility to combine digital as well as analog circuits, CMOS-Technology seems to be favourable for sensor electronics.