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The morphology and mechanical properties of Al2O3, ZrO2 and SiC laser-assisted physically vapour deposited films



Surface and coatings technology (1992), No.54/55, pp.541-547 : Abb.,Lit.
ISSN: 0257-8972
Journal Article
Fraunhofer ILT ()
expense; film; radiation; superconductor; vacuum

Alsub2Osub3, ZrOsub2 and SiC filsm were generated by pulsed CO2 and Nd: YAG laser radiation respectively. The films were investigated by scanning electron microscopy, X-ray diffraction and energy-dispersive Xray analysis. Their properties were tested by the ball grinding method, the scratch test and measurement of current density-potential cives. Different film structures, fine-grained, regular columnar or glassy, were obtained by matching the laser parameters and the processing variables. The film structures are discussed with respect to possible improvements in the coatings, in particular for wear, corrosion and thermal protection of surfaces.