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  4. A monolithic integrated accelerometer fabricated by an industrial CMOS process
 
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1991
Conference Paper
Title

A monolithic integrated accelerometer fabricated by an industrial CMOS process

Author(s)
Riethmüller, W.
Benecke, W.
Schnakenberg, U.
Mainwork
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers  
Conference
International Conference on Solid-State Sensors and Actuators 1991  
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
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