Die Möglichkeiten der CMOS-Technologie zur Herstellung von OPTO-ASIC's

The monolithic integration of optical detectors and circuits for signal processing offers new chances for very small and reliable intelligent optical sensor systems, called OPTO-ASIC's. Particulary attractive are those sensors which can be fabricated without any or with only small modifacations of the CMOS-process. We report on the features of some fully CMOS compatible sensors like two different types of photodiodes, a light sensitive fieldeffecttransistor and a bipolar phototransistor. Additionally deposited layer stacks act as interference filter, in order to modify the spectral response of these sensors. This contribution presents a sensor combined with on-chip-signal processing for exposure measurements in a human eyelike mode. Furthermore, a selective detector for the biological efficient UV-part of sun's radiation near 305 nm is presented, too.