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  4. Models for implantation into multilayer targets
 
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1986
Journal Article
Title

Models for implantation into multilayer targets

Abstract
Models for the description of implantation profiles in multilayer targets are compared. It is found that all analytical models have severe limitations if the different layers possess very different stopping powers. The best description of multilayer targets is obtained by a combination model using density scaling of the range and integration to account for mass conservation.
Author(s)
Ryssel, H.
Lorenz, J.  
Hoffmann, K.
Journal
Applied physics. A  
DOI
10.1007/BF00616841
Language
English
IIS-B  
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