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Models for implantation into multilayer targets

: Ryssel, H.; Lorenz, J.; Hoffmann, K.


Applied physics. A (1986), No.41, pp.201-207
ISSN: 0340-3793
ISSN: 0721-7250
ISSN: 0947-8396
Journal Article
Fraunhofer IIS B ( IISB) ()

Models for the description of implantation profiles in multilayer targets are compared. It is found that all analytical models have severe limitations if the different layers possess very different stopping powers. The best description of multilayer targets is obtained by a combination model using density scaling of the range and integration to account for mass conservation.