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A modeling approach to include mechanical microsystem components into the system simulation

 

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European Design Automation Association -EDAA-; IEEE Computer Society, Technical Committee on Test Technology; Electronic Design Automation Consortium -EDAC-:
Design, automation and test in Europe 1998. Proceedings
Los Alamitos: IEEE Computer Society, 1998
ISBN: 0-8186-8359-7
ISBN: 0-8186-8361-9
pp.510-517
Design, Automation and Test in Europe Conference (DATE) <1998, Paris>
English
Conference Paper
Fraunhofer IIS A ( IIS) ()
microsystem; mechanical components; modeling; simulation

Abstract
For MEMS devices modern technologies are used to integrate very complex components and subsystems closely together. Due to mixed-domain problems as well as the occuring interactions between the closely coupled system components the design is a sophisticated process. The interactions between the MEMS components have to be analysed by system simulation already in an early design stage. In this paper a modeling approach is introduced that enables the incorporation of mechanical microsystem components into the system simulation using network and system simulators like SABER. The approach is based on multi-terminal models of basic mechanical elements and their composition to more complex microsystems. First results for a micromechanical resonator are presented.

: http://publica.fraunhofer.de/documents/PX-24507.html