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Minimum oxygen dose for reliable application of SIMOX
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1992
Journal Article
Titel
Minimum oxygen dose for reliable application of SIMOX
Author(s)
Badenes, G.
Burbach, G.
Gassel, H.
Vogt, H.
Walter, A.
Zeitschrift
Materials Science and Engineering
Konferenz
Ion Beam Synthesis of Compound and Elemental Layers 1991
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS
Tags
dose dependence
oxide properties
SIMOX