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A miniaturized magnetic field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry


Sensors and Actuators. A 54 (1996), No.1-3, pp.443-447 : Lit.
ISSN: 0924-4247
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Conference Paper
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
ASIC; CMOS-Schaltung; Fluxgate-Sensor; Kundenschaltung; Magnetfeldmessung; Sensorsystem

We report on a miniaturized magnetic field sensor system consisting of a fluxgate sensor fabricated in CMOS-compatible planar technology and a CMOS-ASIC for sensor supply, readout and signal processing using second harmonic principle with a feedback loop for zero field operation. The system exhibits a sensitivity of (9.2ñ0.1) mV/µT for a magnetic field range of ñ90µT and a temperature range of 0 deg C to 70 deg C. The 3 dB bandwith is 300 Hz and a noise value of 30 nT/(Hz)1/2 has been estimated. Using 5V supply voltage, the power consumption of the system is measured to be 160mW.