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Miniaturized accelerometers based on silicon micromachining techniques
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1989
Conference Paper
Titel
Miniaturized accelerometers based on silicon micromachining techniques
Author(s)
Benecke, W.
Riethmüller, W.
Schnakenberg, U.
Wagner, B.
Hauptwerk
ESSDERC '89. 19th European Solid State Device Research Conference. Proceedings
Konferenz
European Solid State Device Research Conference 1989
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT