Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Miniaturized accelerometers based on silicon micromachining techniques

 
: Benecke, W.; Riethmüller, W.; Schnakenberg, U.; Wagner, B.

Heuberger, A.; Ryssel, H.; Lange, P.:
ESSDERC '89. 19th European Solid State Device Research Conference. Proceedings
Berlin/West: Springer, 1989
ISBN: 3-540-51000-1
pp.627-630
European Solid State Device Research Conference <19, 1989, Berlin>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-24238.html