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1992
Conference Paper
Title

A miniature single chip pressure and temperature sensor

Abstract
In this paper a single chip pressure and temperature sensor system with on chip electronics for measuring blood pressure and temperature in human arteries is presented. The pressure sensor is fabricated by surface micromachining techniques using a CMOS process. For the signal processing switched capacitor circuits are used. The sensor signals are converted to a pulse width modulated output signal.
Author(s)
Kandler, M.
Manoli, Y.
Mokwa, W.
Spiegel, E.
Vogt, H.
Mainwork
Micromechanics Europe 1992  
Conference
Workshop on Micromachining, Micromechanics and Microsystems 1992  
Micromechanics Europe (MME) 1992  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • Druckmessung

  • integrierter Drucksensor

  • integrierter Temperatursensor

  • Sensorausleseschaltung

  • Temperaturmessung

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