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A miniature single chip pressure and temperature sensor

: Kandler, M.; Manoli, Y.; Mokwa, W.; Spiegel, E.; Vogt, H.

Micromechanics Europe 1992
Leuven, 1992
Workshop on Micromachining, Micromechanics and Microsystems <3, 1992, Leuven>
Micromechanics Europe (MME) <3, 1992, Leuven>
Conference Paper
Fraunhofer IMS ()
Druckmessung; integrierter Drucksensor; integrierter Temperatursensor; Sensorausleseschaltung; Temperaturmessung

In this paper a single chip pressure and temperature sensor system with on chip electronics for measuring blood pressure and temperature in human arteries is presented. The pressure sensor is fabricated by surface micromachining techniques using a CMOS process. For the signal processing switched capacitor circuits are used. The sensor signals are converted to a pulse width modulated output signal.