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Miniature condenser microphone with a thin silicon membrane fabricated on SIMOX substrate

: Horwath, P.; Erlebach, A.; Köhler, R.; Kück, H.

Foundation for Sensor and Actuator Technology, Stockholm:
8th International Conference on Solid-State Sensors and Actuators 1995 and Eurosensors IX. Digest of technical papers. Vol. 2. Sessions A7-D13. Papers No.232-496
Stockholm: Congrex, 1995
ISBN: 91-630-3473-5
International Conference on Solid-state sensors and actuators <8, 1995, Stockholm>
Conference Paper
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
CMOS-Technik; Kondensatormikrophon; Membran; SIMOX; Wandler

A new condenser microphone with a 300 nm thick monocrystalline silicon and silicon nitride sandwich diaphragm and an aluminium backplate fabricated using a sacrificial resist layer, is presented and tested. Microphones with diaphragm side lengths of 200 to 476 µm show a flat frequency response between 50 Hz and 20 kHz and sensitivities up to 0,35 mV/Pa at bias voltage of 2V. The microphones can be fabricated on a single wafer without bonding techniques. The technology is suitable for integration of a CMOS signal processing electronic circuit.