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Title
Mikrooptisches Bauelement
Date Issued
1999
Author(s)
Janes, J.
Patent No
1995-19523526
Abstract
The component comprises a membrane (3) and an optic element (2), which are arranged so that a first surface area (4) of the element lies in a slight distance opposite a first surface (5) of the membrane. Optical radiation (6) enters the optic element at the first surface area and is reflected under an angle of total reflection. The reflected component (7) of the optic radiation exits the optic element, whereby the distance between the first surface are of the element and the first surface of the membrane is set so that the amount of the reflected share of the optic radiation is influenced through a movement of the membrane. USE/ADVANTAGE - E.g. as microphone, pressure sensor, or Golay cell. Provides tolerance to electromagnetic disturbances in proximity of sensor.
Language
de
Patenprio
DE 1995-19523526 A: 19950628