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Title
Mikromechanisches Element
Date Issued
1996
Author(s)
Gesemann, H.J.
Schoenecker, A.
Patent No
1994-4444070
Abstract
The invention relates to the fields of micromechanics and microelectronics and refers to a micromechanical element. The invention is based on the technical problem of specifying a micromechanical element which can be used as a hybrid and can alter precisely the adjustment range independent of its dimension tolerances without the need for special complex measures. The problem is solved by a micromechanical element in which a piezoelectric and/or a ferroelectric component are/is affixed to the underside of a silicon tongue and are/is controllable by an electric field, whereby the underside of the silicon tongue is the opposite side of the side of the silicon tongue bearing the functional element.
Language
de
Patenprio
DE 1994-4444070 A: 19941210