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Mikroelektronischer Phthalocyanin-Gassensor

Microelectronic phthalocyanine gas sensor
: Drost, S.; Hamann, C.; Starke, M.; Mrwa, A.; Müller, M.; Endres, H.-E.

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DE 1993-4302747 A: 19930201
DE 1993-4302747 A: 19930201
DE 4302747 C1: 19940317
Patent, Electronic Publication
Fraunhofer IFT; 2000 dem IZM eingegliedert

The invention relates to a microelectronic phthalocyanine gas sensor for the selective measurement of gases in gas mixtures. The sensor consists of a heating element applied to a carrier body, a passivation layer fully covering the heating element and the areas of the carrier body not covered by the heating element, electrodes arranged on the passivation and a sensitive coating placed above it consisting of a phthalocyanine complex. The invention is characterized by the fact that the passivation layer is formed as an electrically insulating layer made of cubic carbon, cubic borium nitride or a mixture of these substances, and that the phthalocyanine complex is a monophthalocyanine or a diphthalocyanine. The passivation layer protects the sensitive coating from contamination by the carrer material and does not contribute itself to a contamination.