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Microtopography investigations of optical surfaces and thin films by light scattering, optical profilometry, and automatic force microscopy


Stover, J.C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical scattering. Applications, measurement and theory II : 15-16 July 1993, San Diego/Calif.
Bellingham, Wash.: SPIE, 1993 (SPIE Proceedings Series 1995)
ISBN: 0-8194-1244-9
Conference "Optical Scattering: Applications, Measurement, and Theory" <1993, San Diego/Calif.>
Conference Paper
Fraunhofer IOF ()

The roughness of a number of uncoated glass substrates with different surface qualities and of surfaces of fluoride films is investigated by various characterization techniques. The influence of bandwidth limitation and the dependence on the examined sample area become obvious. It is shown that the results obtained from the different measuring methods complement each other appropriately.