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Microtechnologies, microactuator device for lightmodulator applications

 
: Gehner, A.; Doleschal, W.; Schwenger, L.; Kück, H.; Zimmer, G.

Delegation Generale pour l'Armement -DGA-; Centre National de la Recherche Scientifique -CNRS-, Paris:
European Workshop on High Resolution Imaging Through Turbulent or Scattering Media 1998
Palaiseau, 1998
European Workshop on High Resolution Imaging Through Turbulent or Scattering Media <1998, Palaiseau>
English
Conference Paper
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Adaptive Optik; CBM; Mikromechanik; Mikrospiegel; Phasenmodulation; VCL

Abstract
The ongoing progress in microtechnologies in the meantime allows for the fabrication of micromirror actuators of pixelsizes and pitch in the order of 17mu m x 17 mu m or even smaller. Depending on their architecture and the way they manipulate incoming light, micromirrors can be classified into "mainly phasemodulating" and "mainly deflecting" types. Deflecting micromirrors are mainly used for large image projection while those of phase modulating type are mainly used for microprojection (microlithography) until now. For adaptive optics, phasemodulating micromirrors have to be used, which especially provide a pure phase shift. Examples of different micromirror designs will be discussed and performances of the spatial light modulators for different applications, including microlithography will be presented.

: http://publica.fraunhofer.de/documents/PX-24008.html