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Microstructured multilayer dielectric coatings with binary optical functions

: Frank, M.; Schallenberg, U.B.; Kaiser, N.

France, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Developments in optical component coatings : Tagung 15-16 May 1996, Glasgow
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2161-8
Conference "Developments in Optical Component Coatings" <1996, Glasgow>
Conference Paper
Fraunhofer IOF ()
Ätzstop; dielectric filter; dielektrischer Filter; dry etching; etch stop; micropattern; Mikropattern; spectral characteristics; Spektralcharakterisierung; Trockenätzen

Micropatterned interference filters have been developed by dry etching of dielectric multilayer stacks. Apart from the optical demands on the conventional filter design there are new requirements originating from the pattening process, which has to be stopped at the interface between two layers. In this paper the fundamental problems associated with the design and the development of micropatterned multilayer dielectric stacks are discussed. Details of the production of a two-stage filterarray are described and experimental results are presented.