: Weisener, T.; Bark, C.; Schraft, R.D.; Vögele, G.; Bertholds, A.; Braunschweiler, A.; Widmann, M.

Abstract
The development of small pumps in the area of microsystem technology has lead to many different prototypes, mainly using membranes. In contrast to this, a rotary working pump has been developed at IPA, with which both an improvement in the output, as well as pressures previously not possible have been reached. After a first prototype pump with an outer diameter of 10 mm an optimized prototype with an outer diameter of only 2.5 mm was fabricated by AGIE applying electro-discharge-machining. Presently Fraunhofer IPA is working upon the design of a micromotor with the same functional principles. The applications of the new microhydraulic system are exceedingly numerous and extend from technical to medical products.