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Micropatterned multilayer dielectric filters with two spectral characteristics

: Frank, M.; Schallenberg, U.B.; Kaiser, N.


Optical engineering 36 (1997), No.4, pp.1220-1224
ISSN: 0091-3286
ISSN: 0036-1860
Journal Article
Fraunhofer IOF ()
Ätzstop; dielectric filter; dielektrischer Filter; dry etching; micropattern; Mikropattern; spectral characteristics; Spektralcharakterisierung; Trockenätzen

Micropatterned interference filters are developed by dry etching of dielectric multilayer stacks. The application of reactive-ion etching (RIE) techniques combined with the use of an etchstop layer are shown to be quite effective in producing two-stage micropatterns with defined spectral properties. By using a MgF2 underlayer the etching of TiO2 and Si02 layers is stopped exactly. Which provides the possibility to develop large area patterns (>lxl cm2) with feature sizes as small as 10 mu m. The distortion of edge features is shown to be better than 1 mu m. A filter array was developed providing high-reflection and antireflection coatings within a period of 20 mu m.