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Microoptical concepts for miniaturised scanners and switches from design to realisation

: Göring, R.; Döring, D.; Bücker, P; Götz, B.; Schreiber, P.; Dannberg, P.; Kley, E.-N.; Cumme, M.

Ehrfeld, W. ; Institut für Mikrotechnik Mainz GmbH -IMM-:
3rd International Conference on Micro Opto Electro Mechanical Systems (Optical MEMS) 1999. Proceedings
Mainz, 1999
International Conference on Micro Opto Electro Mechanical Systems (MOEMS) <3, 1999, Mainz>
Conference Paper
Fraunhofer IOF ()
fiber optic switches; microoptical components; optical scanner; piezoelectric actuators

We have developed different approaches for optical beam deflection on the base of transmittive microoptical components and miniaturised piezoelectric actuators for high-speed translation of at least one component in the deflection system. Some of these concepts have been further specified for the realisation of special laser beam scanners and fibre optic switches. For these concepts optical design calculations have been performed in order to determine the optimum component parameters of the appropriate microoptical systems. It is very important to know the possibilities of the microoptics technologies when doing the optical design in order to create a realistic microoptical system. Different techniques have been used for the fabrication of the required microoptical components: graytone lithography for one- and two-dimensional rnicroprism arrays, melting resist technique for one- and two-dimensional microlens arrays, precision replication techniques both for cylindrical and spherical le ns arrays and also microprism arrays and ion-beam etching in quartz and silicon. By using optimised microoptical components a series of prototypes for new types of products has been built up and tested with respect to the achievable optical parameters. Special mounting techniques and equipment has been utilised for the system prototype realisation. Considerable effort has to be undertaken in this field for future medium scale production of these systems.