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Micromechanical investigations of amorphous hydrogenated carbon films
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1985
Journal Article
Title
Micromechanical investigations of amorphous hydrogenated carbon films
Author(s)
Pethica, J.B.
Gobrecht, J.
Schueler, C.
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Journal
Journal of vacuum science and technology A. Vacuum, surfaces and films
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF
Keyword(s)
amorpher Kohlenstoff
Mikrohaerte
