English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Microfabrication of complex surface topographies using gray-tone lithography
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1995
Journal Article
Title
Microfabrication of complex surface topographies using gray-tone lithography
Author(s)
Wagner, B.
Quenzer, H.J.
Henke, W.
Hoppe, W.
Pilz, W.
Journal
Sensors and Actuators. A
DOI
10.1016/0924-4247(94)00868-I
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
