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Microelectrodes for a planar "Clark-type" oxygen sensor made by silicon integrated circuit technologies

 
: Cammann, K.; Mokwa, W.; Rospert, M.

3rd International Meeting on Chemical Sensors '90. Proceedings
Cleveland/Ohio: Edison Sensor Technology Center, 1990
pp.149-152
International Meeting on Chemical Sensors (IMCS) <3, 1990, Cleveland/Ohio>
English
Conference Paper
Fraunhofer IMS ()

Abstract
In this paper the preparation of planar microelectrodes for a Clark-type oxygen sensor on silicon substrates by semiconductor technology is described. Platinum cathodes with diameters down to 1 micrometer have been fabricated. To increase the total current, up to 2000 microelectrodes have been arranged in arrays and connected in parallel. Different electrode geometries have been investigated. Performance characteristics of the structure have been investigated and compared to conventional microelectrodes and macroelectrodes. The microelectrode arrays show response times lower than one second on changes in oxygen concentration. Due to the small size of the electrodes the so called "stirring-effect" is eliminated.

: http://publica.fraunhofer.de/documents/PX-23918.html